🌟Routing 🌟 Making physical Connections between signal pins using metal layers are called Routing. Routing is the stage after CTS and Optimization where exact paths for the interconnection of ...
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Tight pitch routing metal with high-NA EUV One of the most challenging patterning layers is the tightest pitch routing metal layers with expected minimum pitch of ~20nm for 1D metal lines with High-NA ...
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Omni 3D arbitrarily interleaves metal layers for both signal/power with FETs in 3D (i.e., nFETs and pFETs are stacked in 3D). Thus, signal/power routing layers have fine-grained, all-sided access to ...
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