Tight pitch routing metal with high-NA EUV One of the most challenging patterning layers is the tightest pitch routing metal layers with expected minimum pitch of ~20nm for 1D metal lines with High-NA ...

Figure 1. A: Block with fixed macros Figure 1. B: Clk* nets routing in layer metal-10(Horizontal shape) and metal-11(Vertical shape) Macros have ESD (Electro Static Discharge) diodes that need a ...

CS is the critical signal that needs to be shielded from noise sources. Let’s assume the critical signal is in Mth metal layer, where M is one of the routing layers for metal. Conventional shielding ...

An international team, led by Tongji University and Beijing Institute of Technology, together with University of Oviedo, demonstrates the possibility of converting linear incident polarization to any ...

Omni 3D arbitrarily interleaves metal layers for both signal/power with FETs in 3D (i.e., nFETs and pFETs are stacked in 3D). Thus, signal/power routing layers have fine-grained, all-sided access to ...